Title :
Simulating micro-electromechanical systems
Author :
Pelz, Georg ; Bielefeld, J. ; Zimmer, G.
Author_Institution :
Dept. of Electron Devices & Circuits, Duisburg Univ.
fDate :
3/1/1995 12:00:00 AM
Abstract :
Modelling micro-electromechanical devices with a system of algebraic and nonlinear (partial) differential equations, as opposed to ordinary differential equations, simplifies the simulation process and eliminates simulator coupling problems. In this article, we automate the modeling of mechanical parts with electronic devices using MeXeL, which translates the system of equations to Spice3-netlists. In this way, difficulties caused by coupling different simulators are eliminated. Here, we show the suitability of such a method by dynamically simulating a deformable mirror device (DMD) and its controlling circuit
Keywords :
SPICE; digital simulation; finite difference methods; micromechanical devices; nonlinear differential equations; partial differential equations; semiconductor device models; MeXeL; Spice3-netlists; deformable mirror device; micro-electromechanical systems; nonlinear partial differential equations; simulation process; Circuit simulation; Deformable models; Differential equations; Electrodes; Finite difference methods; Microelectromechanical systems; Mirrors; Nonlinear equations; Partial differential equations; Voltage;
Journal_Title :
Circuits and Devices Magazine, IEEE
