Miniature robots for a desktop flexible micro manufacturing system

Author

Aoyama, Hisayuki ; Iwata, Futoshi ; Sasaki, Akira

Author_Institution

Dept. of Mech. Eng., Shizuoka Univ., Japan

Volume

16

Issue

1

fYear

1996

fDate

2/1/1996 12:00:00 AM

Firstpage

6

Lastpage

12

Abstract

This article describes the basic structure and performance of miniature robots which incorporate micro-tools and microprobes to produce micro-devices such as LSI materials. In the experiment, typical results at the microscopic level, such as fine grating and micro indenting, are demonstrated. It is suggested that a strategy of combining aspects in a centralized and distributed manner might be useful to increase both productivity and flexibility in manufacturing. The architecture, based on a production process including capability recognition, initial planning, grouping, and dispatching to the working area, is described to control multiple miniature robots under graphical simulation for the desktop precise flexible micro manufacturing system

Keywords

centralised control; digital simulation; distributed control; industrial robots; microactuators; microsensors; position control; production control; robots; LSI materials; capability recognition; desktop flexible micro manufacturing system; fine grating; flexibility; graphical simulation; initial planning; micro indenting; micro-devices; micro-tools; microprobes; miniature robots; productivity; Dispatching; Gratings; Large scale integration; Manufacturing systems; Microscopy; Process planning; Production planning; Production systems; Productivity; Robots;

fLanguage

English

Journal_Title

Control Systems, IEEE

Publisher

ieee

ISSN

1066-033X

Type

jour

DOI

10.1109/37.482131

Filename

482131