Title :
Computerized digitizing technique for DLTS measurements
Author :
Avila-Garcia, Alejandm ; Barranca, Alfred0 Reyes
Author_Institution :
Dept. of Electr. Eng., Centro de Investigacion y de Estudios Avanzados, IPN, Mexico City, Mexico
fDate :
12/1/1994 12:00:00 AM
Abstract :
An enhanced version of an algorithm developed by Maguire and Marshall in their computerized DLTS system is presented. Improvements consist of introducing analysis of partial processing of digitized transients by deleting the initial part, which usually includes the loading transient caused by the measurement circuit RC constant. Also, a method to calculate trap concentration without using correlation functions is added. Some of the limitations involved with the use of this algorithm are also discussed
Keywords :
computerised instrumentation; deep level transient spectroscopy; spectroscopy; spectroscopy computing; DLTS measurements; Maguire and Marshall; computerized digitizing technique; correlation functions; deep level transient spectroscopy; digitized transients; loading transient; measurement circuit RC constant; partial processing; semiconductor defects; trap concentration; Capacitance; Circuits; Data acquisition; Distortion measurement; Filling; Laboratories; Spectroscopy; Temperature dependence; Time measurement; Transient analysis;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
