Computerized digitizing technique for DLTS measurements

Author

Avila-Garcia, Alejandm ; Barranca, Alfred0 Reyes

Author_Institution

Dept. of Electr. Eng., Centro de Investigacion y de Estudios Avanzados, IPN, Mexico City, Mexico

Volume

43

Issue

6

fYear

1994

fDate

12/1/1994 12:00:00 AM

Firstpage

936

Lastpage

939

Abstract

An enhanced version of an algorithm developed by Maguire and Marshall in their computerized DLTS system is presented. Improvements consist of introducing analysis of partial processing of digitized transients by deleting the initial part, which usually includes the loading transient caused by the measurement circuit RC constant. Also, a method to calculate trap concentration without using correlation functions is added. Some of the limitations involved with the use of this algorithm are also discussed

Keywords

computerised instrumentation; deep level transient spectroscopy; spectroscopy; spectroscopy computing; DLTS measurements; Maguire and Marshall; computerized digitizing technique; correlation functions; deep level transient spectroscopy; digitized transients; loading transient; measurement circuit RC constant; partial processing; semiconductor defects; trap concentration; Capacitance; Circuits; Data acquisition; Distortion measurement; Filling; Laboratories; Spectroscopy; Temperature dependence; Time measurement; Transient analysis;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.368071

Filename

368071