Title :
Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates
Author :
Mattila, Pentti ; Tsuzuki, Fabio ; Väätäjä, Heli ; Sasaki, Ken
Author_Institution :
VTT Tech. Res. Center, Tampere, Finland
Abstract :
Capacitive ultrasonic transducers are widely used to generate airborne ultrasound. This paper presents an equivalent circuit for an electrostatic transducer with a V-grooved backplate. The comparison between simulation results and measurements on a prototype transducer shows that the model gives reliable results. This model is useful in many applications, for example to simulate sensors in a robot and to design ultrasonic transducer systems.<>
Keywords :
acoustic transducers; electrostatic devices; equivalent circuits; robot vision; ultrasonic transducers; V-grooved backplates; airborne ultrasound generation; electroacoustic model; electrostatic ultrasonic transducers; equivalent circuit; robot sensors; Acoustic transducers; Biomembranes; Circuit simulation; Electrostatic measurements; Equivalent circuits; Resonant frequency; Ultrasonic imaging; Ultrasonic transducers; Ultrasonic variables measurement; Voltage;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
