DocumentCode
1248331
Title
IEEE Transactions on Semiconductor Manufacturing publication information
Volume
22
Issue
4
fYear
2009
Abstract
Provides a listing of current staff, committee members and society officers.
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2009.2035660
Filename
5308666
Link To Document