DocumentCode :
1249019
Title :
On the Use of Silver Nanoparticles for Direct Micropatterning on Polyimide Substrates
Author :
Ng, Jack H -G ; Watson, David E G ; Sigwarth, Joachim ; McCarthy, Aongus ; Prior, Kevin A. ; Hand, Duncan P. ; Yu, Weixing ; Kay, Robert W. ; Liu, Changqing ; Desmulliez, Marc P Y
Author_Institution :
Microsyst. Eng. Centre, Heriot-Watt Univ., Edinburgh, UK
Volume :
11
Issue :
1
fYear :
2012
Firstpage :
139
Lastpage :
147
Abstract :
This paper proposes a direct micropatterning process based on the growth of photoreduced silver nanoparticles onto polyimide substrates. The silver nanoparticles are found to have sufficient catalytic efficiency for subsequent electroless plating. Characterization of the process indicates that UV energy dose and heat treatment have to be traded off against photo and thermal degradation of the polymer substrate. Factors affecting the adhesion of the final electroless metal deposit are also discussed.
Keywords :
adhesion; electroplating; heat treatment; metallisation; nanofabrication; nanoparticles; silver; ultraviolet spectra; Ag; UV energy; adhesion; catalytic efficiency; direct micropatterning; electroless metal deposit; electroless plating; heat treatment; metallization; nanoparticle; photodegradation; polymer substrate; thermaldegradation; Heat treatment; Polyimides; Silver; Substrates; Surface morphology; Surface treatment; Direct writing; electroless plating; flexible substrate; interconnections; metallization; micropatterning; packaging; photolithography; polyimide; silver nanoparticles;
fLanguage :
English
Journal_Title :
Nanotechnology, IEEE Transactions on
Publisher :
ieee
ISSN :
1536-125X
Type :
jour
DOI :
10.1109/TNANO.2011.2160092
Filename :
5898423
Link To Document :
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