Title :
On the Use of Silver Nanoparticles for Direct Micropatterning on Polyimide Substrates
Author :
Ng, Jack H -G ; Watson, David E G ; Sigwarth, Joachim ; McCarthy, Aongus ; Prior, Kevin A. ; Hand, Duncan P. ; Yu, Weixing ; Kay, Robert W. ; Liu, Changqing ; Desmulliez, Marc P Y
Author_Institution :
Microsyst. Eng. Centre, Heriot-Watt Univ., Edinburgh, UK
Abstract :
This paper proposes a direct micropatterning process based on the growth of photoreduced silver nanoparticles onto polyimide substrates. The silver nanoparticles are found to have sufficient catalytic efficiency for subsequent electroless plating. Characterization of the process indicates that UV energy dose and heat treatment have to be traded off against photo and thermal degradation of the polymer substrate. Factors affecting the adhesion of the final electroless metal deposit are also discussed.
Keywords :
adhesion; electroplating; heat treatment; metallisation; nanofabrication; nanoparticles; silver; ultraviolet spectra; Ag; UV energy; adhesion; catalytic efficiency; direct micropatterning; electroless metal deposit; electroless plating; heat treatment; metallization; nanoparticle; photodegradation; polymer substrate; thermaldegradation; Heat treatment; Polyimides; Silver; Substrates; Surface morphology; Surface treatment; Direct writing; electroless plating; flexible substrate; interconnections; metallization; micropatterning; packaging; photolithography; polyimide; silver nanoparticles;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2011.2160092