Title :
Quasi-TE00 single-mode optical waveguides for electro-optical modulation at 1.3 μm using standard SIMOX material
Author :
Orobtchouk, R. ; Koster, A. ; Pascal, D. ; Laval, S.
Author_Institution :
Inst. d´´Electron. Fondamentale, Univ. de Paris-Sud, Orsay, France
fDate :
4/1/1997 12:00:00 AM
Abstract :
A standard SIMOX substrate with 0.2 μm silicon film can be used for integrated optics. A lateral P+-I-N+ structure in the silicon film is proposed to obtain electro-optical phase modulation by carrier injection. Field confinement is ensured by a rib-loaded geometry. Simulations have been performed to estimate waveguide losses for such 2D-guiding structures suitable for phase modulation. Quasi-single-mode propagation with low losses in the doped regions and low additional loss under injection conditions is predicted
Keywords :
SIMOX; electro-optical modulation; integrated optics; optical losses; optical planar waveguides; optical waveguides; phase modulation; silicon; 0.2 mum; 1.3 mum; 2D-guiding structures; Si; carrier injection; doped regions; electro-optical modulation; electro-optical phase modulation; injection conditions; integrated optics; lateral P+-I-N+ structure; low additional loss; phase modulation; quasi-TE00 single-mode optical waveguides; quasi-single-mode propagation; rib-loaded geometry; silicon film; standard SIMOX material; standard SIMOX substrate; waveguide losses;
Journal_Title :
Optoelectronics, IEE Proceedings -
DOI :
10.1049/ip-opt:19971037
