Title :
Microlens fabricated by the planar process
Author :
Shimada, Jun-ichi ; Ohguchi, Osamu ; Sawada, Renshi
Author_Institution :
NTT Appl. Electron. Lab., Tokyo, Japan
fDate :
5/1/1991 12:00:00 AM
Abstract :
A novel microlens that can be integrated on a laser-diode substrate by the planar process is proposed. It consists of two microcylindrical lenses fabricated by the planar process, and all of their dimensions are less than 100 μm. One lens is a horizontal focusing lens whose curved shape determines focusing. The other is a vertical focusing lens whose gradient refractive index determines focusing. The relationship between fabrication errors and lens characteristics is quantitatively established by comparing lenses with various fabrication errors. Also a laser diode integrated with the horizontal focusing lens is successfully fabricated without damage
Keywords :
gradient index optics; integrated optics; laser accessories; lenses; optical workshop techniques; semiconductor junction lasers; curved shape; fabrication errors; gradient refractive index; horizontal focusing lens; integration; laser-diode substrate; lens characteristics; microcylindrical lenses; microlens; planar process; vertical focusing lens; Apertures; Diode lasers; Laser beams; Lenses; Microoptics; Optical device fabrication; Optical devices; Optical sensors; Refractive index; Substrates;
Journal_Title :
Lightwave Technology, Journal of
