Title :
Developing infrastructure to mass-produce MEMS
Author :
Markus, Karen W.
Author_Institution :
MEMS Technol. Applications Center, MCNC, Research Triangle Park, NC, USA
Abstract :
Though microelectromechanical systems are often made from silicon, the existing semiconductor technology base faces numerous challenges to meet the special requirements of fabricating MEMS devices. To realize economies of scale, seven aspects of MEMS manufacturing infrastructure must be improved: computer aided design and simulation; lithography; etching; parametric testing; functional testing; packaging; and capital equipment
Keywords :
circuit analysis computing; etching; integrated circuit testing; lithography; micromechanical devices; semiconductor device manufacture; MEMS device fabrication; MEMS manufacturing infrastructure; MEMS mass production; capital equipment; computer aided design; etching; functional testing; lithography; microelectromechanical systems; packaging; parametric testing; semiconductor technology base; simulation; Computational modeling; Computer aided manufacturing; Economies of scale; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Semiconductor device manufacture; Silicon; Testing; Virtual manufacturing;
Journal_Title :
Computational Science & Engineering, IEEE
