DocumentCode :
1250932
Title :
Plating of small blind vias [multilayer PCBs]
Author :
Kou, Show-Chin ; Hung, Aina
Author_Institution :
Dept. of Chem. Eng., Ta-Hwa Inst. of Technol., Hsinchu, Taiwan
Volume :
22
Issue :
3
fYear :
1999
fDate :
7/1/1999 12:00:00 AM
Firstpage :
202
Lastpage :
208
Abstract :
Metallization of laminates with blind vias on the dielectric side was performed by electroless copper plating with subsequent copper electroplating. The vertical cross section of blind vias with diameters between 125 and 75 μm were analyzed by reflective microscopy. Results indicate that ultrasonic vibration during the pretreatment processes of metallization enables complete electroless copper deposition of the inside wall of the small blind vias without any voids. Furthermore, the introduction of periodic pulse reversal current for the subsequent copper electroplating process resulted in high throwing power deposition. By employing these two protocols, it has been demonstrated that high throwing power deposition can be readily achieved for blind vias as small as 75 μm in diameter with an aspect ratio of 3:1
Keywords :
electroless deposition; electroplating; metallisation; printed circuit manufacture; 75 to 125 micron; aspect ratio; blind vias; electroless plating; electroplating; laminate metallisation; periodic pulse reversal current; pretreatment processes; reflective microscopy; throwing power; ultrasonic vibration; Copper; Dielectrics; Integrated circuit interconnections; Laser ablation; Metallization; Nonhomogeneous media; Pulsed laser deposition; Scanning electron microscopy; Thermal resistance; Wiring;
fLanguage :
English
Journal_Title :
Electronics Packaging Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
1521-334X
Type :
jour
DOI :
10.1109/6104.795855
Filename :
795855
Link To Document :
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