• DocumentCode
    1251641
  • Title

    Characterizing unpoled piezoelectric ceramic film by Lamb-waves

  • Author

    Wang, Z. ; Cheeke, J. David N

  • Author_Institution
    Dept. of Phys., Concordia Univ., Montreal, Que., Canada
  • Volume
    46
  • Issue
    5
  • fYear
    1999
  • Firstpage
    1094
  • Lastpage
    1100
  • Abstract
    Determination of the physical properties of unpoled ceramic films on metallic substrates is considered; the problem is important because these properties may be quite different than those in the bulk, which are caused by the effects of porosity. It is shown that the density and elastic constant C/sub 33/ can be determined by a modification of the previously used modal frequency spacing (MFS) method, involving cut-off frequencies for longitudinal and shear sagittal plane modes. This method has the advantage of great simplicity compared with the standard inversion approach. Numerical calculations show that good accuracy of the order of 2% can be obtained for density and for C/sub 33/ for simulations of PZT films on stainless steel, platinum, and aluminum plates.
  • Keywords
    elastic constants; lead compounds; piezoceramics; piezoelectric thin films; piezoelectric transducers; ultrasonic transducers; Lamb-waves; PZT; PZT films; PbZrO3TiO3; US transducers; cut-off frequencies; density; elastic constant; longitudinal modes; modal frequency spacing method; shear sagittal plane modes; unpoled piezoelectric ceramic film; Acoustic measurements; Ceramics; Coatings; Dielectric constant; Frequency; Piezoelectric films; Platinum; Steel; Substrates; Thick films;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/58.796115
  • Filename
    796115