DocumentCode
1251641
Title
Characterizing unpoled piezoelectric ceramic film by Lamb-waves
Author
Wang, Z. ; Cheeke, J. David N
Author_Institution
Dept. of Phys., Concordia Univ., Montreal, Que., Canada
Volume
46
Issue
5
fYear
1999
Firstpage
1094
Lastpage
1100
Abstract
Determination of the physical properties of unpoled ceramic films on metallic substrates is considered; the problem is important because these properties may be quite different than those in the bulk, which are caused by the effects of porosity. It is shown that the density and elastic constant C/sub 33/ can be determined by a modification of the previously used modal frequency spacing (MFS) method, involving cut-off frequencies for longitudinal and shear sagittal plane modes. This method has the advantage of great simplicity compared with the standard inversion approach. Numerical calculations show that good accuracy of the order of 2% can be obtained for density and for C/sub 33/ for simulations of PZT films on stainless steel, platinum, and aluminum plates.
Keywords
elastic constants; lead compounds; piezoceramics; piezoelectric thin films; piezoelectric transducers; ultrasonic transducers; Lamb-waves; PZT; PZT films; PbZrO3TiO3; US transducers; cut-off frequencies; density; elastic constant; longitudinal modes; modal frequency spacing method; shear sagittal plane modes; unpoled piezoelectric ceramic film; Acoustic measurements; Ceramics; Coatings; Dielectric constant; Frequency; Piezoelectric films; Platinum; Steel; Substrates; Thick films;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/58.796115
Filename
796115
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