Title :
Design of SAW synchronous resonators on ST cut quartz
Author :
Soluch, Waldemar
Author_Institution :
Inst. of Electron. Mater. Technol., Warsaw, Poland
Abstract :
Surface acoustic wave (SAW) resonators on ST cut quartz, with synchronous placement of the interdigital transducers (IDT), were designed, fabricated, and measured. The basic structure of the resonators was a two-port one. The one-port resonators were obtained by parallel connection of the two IDT or by short circuiting one of them. The IDT were apodized to eliminate coupling to spurious modes. The transfer function of the two-port resonators was calculated by using the scattering matrix method. Several models of these resonators were investigated in the frequency range from about 300 to 715 MHz. By matching the theoretical and experimental transfer functions, the loss coefficient as a function of frequency and the SAW velocity in the reflector area as a function of aluminium layer thickness were determined. The responses of the resonators were free of any spurious modes.
Keywords :
S-matrix theory; interdigital transducers; surface acoustic wave resonators; transfer function matrices; 300 to 715 MHz; SAW synchronous resonators; SAW velocity; ST cut quartz; loss coefficient; one-port resonators; scattering matrix method; synchronous IDT placement; transfer function; two-port resonators; Acoustic transducers; Acoustic waves; Aluminum; Coupling circuits; Reflection; Resonant frequency; Scattering; Surface acoustic waves; Transfer functions; Voltage-controlled oscillators;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on