Title :
Characterization of electromechanical coupling coefficients of piezoelectric films using composite resonators
Author :
Wang, Zuoging ; Zhang, Yuxing ; Cheeke, J. David N
Author_Institution :
Dept. of Phys., Concordia Univ., Montreal, Que., Canada
Abstract :
By analyzing the resonance frequency spectrum of a composite resonator consisting of a piezoelectric ceramic film deposited on a substrate plate, the thickness extensional mode electromechanical coupling coefficient of the film, k/sub t//sup 2/, can be directly calculated from the effective coupling factor values, k/sub eff//sup 2/, for two special modes of the resonator. The effects of the mechanical loss in the piezoelectric films on the measurement are investigated by numerical simulation, and some guidelines for improving the accuracy of the k/sub t//sup 2/ measurement are reported.
Keywords :
crystal resonators; piezoceramics; piezoelectric thin films; composite resonators; effective coupling factor; electromechanical coupling coefficients; mechanical loss effects; numerical simulation; parallel resonance; piezoelectric films; porous piezoceramic film; resonance frequency spectrum; resonator modes; series resonance; thickness extensional mode; Acoustic measurements; Ceramics; Guidelines; Loss measurement; Mechanical variables measurement; Piezoelectric films; Resonance; Resonant frequency; Substrates; Surface acoustic waves;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
