Characterization of electromechanical coupling coefficients of piezoelectric films using composite resonators

Author

Wang, Zuoging ; Zhang, Yuxing ; Cheeke, J. David N

Author_Institution

Dept. of Phys., Concordia Univ., Montreal, Que., Canada

Volume

46

Issue

5

fYear

1999

Firstpage

1327

Lastpage

1330

Abstract

By analyzing the resonance frequency spectrum of a composite resonator consisting of a piezoelectric ceramic film deposited on a substrate plate, the thickness extensional mode electromechanical coupling coefficient of the film, k/sub t//sup 2/, can be directly calculated from the effective coupling factor values, k/sub eff//sup 2/, for two special modes of the resonator. The effects of the mechanical loss in the piezoelectric films on the measurement are investigated by numerical simulation, and some guidelines for improving the accuracy of the k/sub t//sup 2/ measurement are reported.

Keywords

crystal resonators; piezoceramics; piezoelectric thin films; composite resonators; effective coupling factor; electromechanical coupling coefficients; mechanical loss effects; numerical simulation; parallel resonance; piezoelectric films; porous piezoceramic film; resonance frequency spectrum; resonator modes; series resonance; thickness extensional mode; Acoustic measurements; Ceramics; Guidelines; Loss measurement; Mechanical variables measurement; Piezoelectric films; Resonance; Resonant frequency; Substrates; Surface acoustic waves;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.796138

Filename

796138