Title :
Development of novel optoelectromechanical systems based on "transparent metals" PBG structures
Author :
Baglio, Salvatore ; Bloemer, Mark ; Savalli, Nicolò ; Scalora, Mike
Author_Institution :
Catania Univ., Italy
fDate :
12/1/2001 12:00:00 AM
Abstract :
Developed a novel smart optoelectromechanical structure, fabricated using a multilayer, metal-dielectric photonic band gap (PBG) structure. We discuss innovative devices with electrically controllable optical properties that can be used as sensors with optical output signals for applications in harsh or hostile environments (pressure sensors, micro gravimeter, or micro accelerometer) or as optical modulators and optical limiters. Theoretical models of these novel devices together with experimental prototypes have been developed, and characterization of the devices has been performed. Moreover, microelectromechanical devices have been studied for application to this field and are presented. In particular, the problem of realizing highly sensitive accelerometers has been addressed, and it will be shown that the proposed approach allows detecting displacements of a few nanometers
Keywords :
accelerometers; gravimeters; micro-optics; microsensors; optical modulation; photonic band gap; pressure sensors; MOEMS; accelerometers; electrically controllable optical properties; hostile environments; metal-dielectric photonic band gap structure; microaccelerometer; microelectromechanical devices; microgravimeter; microsensors; optical limiters; optical modulators; optical output signals; optoelectromechanical systems; pressure sensors; Accelerometers; Intelligent sensors; Nonhomogeneous media; Optical control; Optical devices; Optical modulation; Optical sensors; Photonic band gap; Pressure control; Sensor phenomena and characterization;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/7361.983468