DocumentCode :
1252291
Title :
Micromachined water vapor sensors: a review of sensing technologies
Author :
Fenner, Ralph ; Zdankiewicz, Edward
Author_Institution :
Hygrometrix Inc., Alpine, CA, USA
Volume :
1
Issue :
4
fYear :
2001
fDate :
12/1/2001 12:00:00 AM
Firstpage :
309
Lastpage :
317
Abstract :
The measurement of water vapor is important in many applications ranging from predicting changes in the weather to ensuring heating and cooling comfort in homes. In manufacturing, water vapor measurements help to control performance properties of engineered materials and optimize fuel efficiency in power generation. This paper presents a technology review of water vapor sensors and manufacturing techniques. Micromachining, more commonly known as MEMS or microelectromechanical systems, is an enabling technology based upon standard semiconductor manufacturing. MEMS technology makes possible solid-state sensors with greatly reduced power consumption and low operating voltage that are fully compatible with digital electronics and can be manufactured in high volumes at low cost. A water vapor microsensor just becomes another part on the circuit board. A "technology roadmap" for water vapor microsensors is defined where the sensing technologies have been organized into four major transduction schemes: capacitive, mass-sensitive, optical and resistive. Sensing element type, key geometric features and excitation scheme provides further classification. Operating principles and general performance characteristics are also presented
Keywords :
gas sensors; micromachining; microsensors; reviews; MEMS; microelectromechanical systems; micromachining; operating voltage; power consumption; semiconductor manufacturing; sensing technologies; solid-state sensors; transduction schemes; water vapor measurements; water vapor sensors; Cooling; Fuels; Micromechanical devices; Microsensors; Power engineering and energy; Power measurement; Semiconductor device manufacture; Semiconductor materials; Water heating; Weather forecasting;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/7361.983470
Filename :
983470
Link To Document :
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