DocumentCode
1252317
Title
Analytical solutions of sensitivity for pressure microsensors
Author
Gong, Shih-Chin ; Lee, Chengkuo
Author_Institution
Asia Pacific Microsystems Inc, Hsinchu, Taiwan
Volume
1
Issue
4
fYear
2001
fDate
12/1/2001 12:00:00 AM
Firstpage
340
Lastpage
344
Abstract
Pressure microsensors are normally designed in linear operation range. In this study, analytical solutions are presented in order to offer a set of simple equations to designers and researchers to calculate and predict the sensitivity of pressure microsensors. The pressure sensitivity is proportional to the square of the ratio of diaphragm thickness to diaphragm length, but it is inversely proportional to burst pressure. We found that the analytical solutions are in good agreement with simulation by finite element method
Keywords
diaphragms; finite element analysis; microsensors; pressure sensors; analytical model; burst pressure; diaphragm; finite element simulation; linear operation; pressure microsensor; sensitivity; Analytical models; Bridges; Epitaxial growth; Equations; Finite element methods; Microsensors; Piezoresistance; Resistors; Silicon; Stress;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/7361.983474
Filename
983474
Link To Document