Title :
Analytical solutions of sensitivity for pressure microsensors
Author :
Gong, Shih-Chin ; Lee, Chengkuo
Author_Institution :
Asia Pacific Microsystems Inc, Hsinchu, Taiwan
fDate :
12/1/2001 12:00:00 AM
Abstract :
Pressure microsensors are normally designed in linear operation range. In this study, analytical solutions are presented in order to offer a set of simple equations to designers and researchers to calculate and predict the sensitivity of pressure microsensors. The pressure sensitivity is proportional to the square of the ratio of diaphragm thickness to diaphragm length, but it is inversely proportional to burst pressure. We found that the analytical solutions are in good agreement with simulation by finite element method
Keywords :
diaphragms; finite element analysis; microsensors; pressure sensors; analytical model; burst pressure; diaphragm; finite element simulation; linear operation; pressure microsensor; sensitivity; Analytical models; Bridges; Epitaxial growth; Equations; Finite element methods; Microsensors; Piezoresistance; Resistors; Silicon; Stress;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/7361.983474
