Title :
Poly-Silicon Grating Couplers for Efficient Coupling With Optical Fibers
Author :
Qiu, Chao ; Sheng, Zhen ; Li, Le ; Pang, Albert ; Wang, Zhiqi ; Wu, Aimin ; Wang, Xi ; Zou, Shichang ; Gan, Fuwan
Author_Institution :
State Key Lab. of Functional Mater. for Inf., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
Abstract :
Waveguide grating couplers based on complementary metal-oxide-semiconductor (CMOS) poly-silicon gate layers are designed and fabricated. Sharing the same etching profile as that of the CMOS poly-silicon gate layer, the fabrication of the grating couplers is fully embedded in the CMOS process without adding any additional masks or process steps. Peak coupling efficiency of 40% and 3 dB bandwidth of ~60 nm, as well as a low reflection, are experimentally achieved. The coupling efficiency can be further improved to ~70% by using silicon-on-insulator wafers with optimal parameters.
Keywords :
CMOS integrated circuits; diffraction gratings; integrated optoelectronics; optical design techniques; optical fibre couplers; optical fibre fabrication; optical waveguides; silicon-on-insulator; CMOS poly-silicon gate layers; Si; complementary metal-oxide-semiconductor; efficient coupling; optical fibers; poly-silicon grating couplers; silicon-on-insulator wafers; waveguide grating couplers; CMOS integrated circuits; Couplers; Couplings; Gratings; Logic gates; Optical waveguides; Silicon; Complementary metal-oxide-semiconductor (CMOS) technology; silicon photonics; silicon-on-insulator (SOI) waveguide; waveguide grating coupler;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2012.2210703
