DocumentCode :
1253524
Title :
Helicons-the past decade
Author :
Chen, Francis F. ; Boswell, Rod W.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Volume :
25
Issue :
6
fYear :
1997
fDate :
12/1/1997 12:00:00 AM
Firstpage :
1245
Lastpage :
1257
Abstract :
First observed in gaseous plasmas in the early 1960s, helicon discharges lay like a sleeping giant until they emerged in the 1980s, when their usefulness as efficient plasma sources for processing microelectronic circuits for the burgeoning semiconductor industry became recognized. Research on helicons spread to many countries; new, challenging, unexpected problems arose, and these have spawned solutions and novel insights into the physical mechanisms in magnetized radio-frequency discharges. Among the most baffling puzzles were the reason for the high ionization efficiency of helicon discharges and the dominance of the right-hand polarized mode over the left-hand one. The most recent results indicate that a nonobvious resolution of these problems is at hand
Keywords :
helicons; high-frequency discharges; history; plasma production; plasma waves; reviews; gaseous plasmas; helicon discharges; helicons; ionization efficiency; left-hand polarized mode; magnetized radio-frequency discharges; microelectronic circuits; plasma sources; right-hand polarized mode; semiconductor industry; Circuits; Electronics industry; Fault location; Ionization; Magnetic semiconductors; Microelectronics; Plasma applications; Plasma materials processing; Plasma sources; Radio frequency;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/27.650899
Filename :
650899
Link To Document :
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