Impedance model of helical resonator discharge

Author

Park, Jong-Chul ; Kang, Bongkoo

Author_Institution

Dept. of Electr. Eng., Pokang Univ. of Sci. & Technol., South Korea

Volume

25

Issue

6

fYear

1997

fDate

12/1/1997 12:00:00 AM

Firstpage

1398

Lastpage

1405

Abstract

Modeling and measurement results of the RF input impedance of a helical resonator discharge are given. A simple microstrip transmission line model is used to extract an equivalent circuit of a helical resonator discharge. The transmission line model consists of a grounded cylinder for RF shielding, a helical copper coil for RF heating, and a high density plasma. Transmission line parameters for an experimental helical resonator discharge chamber are extracted, and the results are compared with the measured results. The measured transmission line parameters for the experimental reactor are the characteristic impedance of 200 Ω, the attenuation constant of 6×10^-3 Np/m, and the wave number of 0.36 rad/m, which have good agreement with the calculated values

Keywords

high-frequency discharges; plasma density; plasma radiofrequency heating; RF heating; RF input impedance; RF shielding; equivalent circuit; grounded cylinder; helical Cu coil; helical resonator discharge; high density plasma; impedance model; microstrip transmission line model; modeling; Coils; Copper; Distributed parameter circuits; Equivalent circuits; Heating; Impedance measurement; Microstrip resonators; Plasma measurements; Radio frequency; Transmission line measurements;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.650909

Filename

650909