Title :
Impedance model of helical resonator discharge
Author :
Park, Jong-Chul ; Kang, Bongkoo
Author_Institution :
Dept. of Electr. Eng., Pokang Univ. of Sci. & Technol., South Korea
fDate :
12/1/1997 12:00:00 AM
Abstract :
Modeling and measurement results of the RF input impedance of a helical resonator discharge are given. A simple microstrip transmission line model is used to extract an equivalent circuit of a helical resonator discharge. The transmission line model consists of a grounded cylinder for RF shielding, a helical copper coil for RF heating, and a high density plasma. Transmission line parameters for an experimental helical resonator discharge chamber are extracted, and the results are compared with the measured results. The measured transmission line parameters for the experimental reactor are the characteristic impedance of 200 Ω, the attenuation constant of 6×10-3 Np/m, and the wave number of 0.36 rad/m, which have good agreement with the calculated values
Keywords :
high-frequency discharges; plasma density; plasma radiofrequency heating; RF heating; RF input impedance; RF shielding; equivalent circuit; grounded cylinder; helical Cu coil; helical resonator discharge; high density plasma; impedance model; microstrip transmission line model; modeling; Coils; Copper; Distributed parameter circuits; Equivalent circuits; Heating; Impedance measurement; Microstrip resonators; Plasma measurements; Radio frequency; Transmission line measurements;
Journal_Title :
Plasma Science, IEEE Transactions on
