DocumentCode
1253708
Title
MEMS
Author
Sadiku, Matthew
Author_Institution
Boeing Satellite Syst., Los Angeles, CA, USA
Volume
21
Issue
1
fYear
2002
Firstpage
4
Lastpage
5
Abstract
MEMS (Micro-Electro-Mechanical Systems) technology has already taken root firmly in today´s world. It is destined to become a hallmark 21st century manufacturing technology with numerous and diverse applications. MEMS will have a dramatic impact or everything from aerospace technology to biotechnology. As a breakthrough technology allowing unparalleled synergy between apparently unrelated fields of endeavour such as biology and microelectronics, MEMS is forecasted to have a commercial and defense market growth similar to its parent IC technology. The author presents a brief overview of this breakthrough technology, looking at the design, fabrication process, packaging, testing and applications
Keywords
micromachining; micromechanical devices; packaging; MEMS applications; MEMS technology; fabrication process; manufacturing technology; micro-electro-mechanical systems; micromachining processes; packaging; testing;
fLanguage
English
Journal_Title
Potentials, IEEE
Publisher
ieee
ISSN
0278-6648
Type
jour
DOI
10.1109/45.985317
Filename
985317
Link To Document