Buried rib passive waveguide Y junctions with sharp vertex on InP

Author

Shani, Yosi ; Koren, Uzi ; Miller, Barry I. ; Young, Martin G. ; Oron, Moshe ; Alferness, Rod

Author_Institution

AT&T Bell Lab., Holmdel, NJ, USA

Volume

3

Issue

3

fYear

1991

fDate

3/1/1991 12:00:00 AM

Firstpage

210

Lastpage

212

Abstract

A technique is presented for fabricating intersecting waveguides with a sharp junction vertex. This technique was demonstrated by fabricating buried rib waveguide Y branches on InP with a junction vertex width of about 1/8 mu m. These Y branches had lower loss than the regular blunt Y branches but suffered from a dissimilar splitting coefficient between the two arms. This technique may also be useful for fabricating other waveguide elements such as crossed waveguides, zero gap directional couplers, and optical switches. A comparison with theoretical calculations is also given.<>

Keywords

III-V semiconductors; indium compounds; integrated optics; optical couplers; optical waveguides; optical workshop techniques; InP; buried rib intersecting waveguide fabrication; crossed waveguides; dissimilar splitting coefficient; junction vertex width; optical switches; passive waveguide Y junctions; sharp junction vertex; waveguide elements; waveguide losses; zero gap directional couplers; Arm; Couplers; Etching; Indium phosphide; Lithography; Optical losses; Optical waveguides; Propagation losses; Resists; Waveguide junctions;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.79756

Filename

79756