Title :
High-Q vertically coupled InP microdisk resonators
Author :
Djordjev, Kostadin ; Choi, Seung-June ; Choi, Sang-Jun ; Dapkus, P.D.
Author_Institution :
Dept. of Electr. Eng.-Electrophys., Univ. of Southern California, Los Angeles, CA, USA
fDate :
3/1/2002 12:00:00 AM
Abstract :
High-quality factor vertically coupled InP microdisk resonators have been fabricated. Wafer bonding techniques have been used as a main approach to enable this three-dimensional structure. The devices exhibit smooth sidewalls, single mode operation, and high-quality factors in excess of 7000.
Keywords :
III-V semiconductors; Q-factor; gallium arsenide; indium compounds; integrated optics; micro-optics; micromechanical resonators; optical fabrication; optical resonators; optical waveguide components; photolithography; wafer bonding; wavelength division multiplexing; InGaAsP-InP; InGaAsP/InP high-Q vertically coupled microdisk resonators; InP; MOCVD; demultiplexers; high quality factors; integrated optics; microresonators; optical lithography; photonic integrated circuits; single mode operation; smooth sidewalls; three-dimensional structure; wafer bonding techniques; wavelength-division multiplexing; Indium phosphide; Integrated optics; Microcavities; Optical filters; Optical resonators; Optical waveguides; Resonance; Resonator filters; Wafer bonding; Wavelength division multiplexing;
Journal_Title :
Photonics Technology Letters, IEEE
