A two-dimensional micromachined accelerometer

Author

Ahmad, Haidar ; Al-Khalili, Asim J. ; Landsberger, Les M. ; Kahrizi, Mojtaba

Author_Institution

Dept. of Electr. & Comput. Eng., Concordia Univ., Montreal, Que., Canada

Volume

46

Issue

1

fYear

1997

fDate

2/1/1997 12:00:00 AM

Firstpage

18

Lastpage

26

Abstract

A surface micromachined two-dimensional (2-D) accelerometer is designed and implemented in CMOS. The implementation requires the addition of three masking steps to a commercially available standard CMOS process. It has a ±100 g full range reading and better than 1% linearity within this range with a sensitivity of 0.5 mV/g. The signal detection circuitry is an on-chip switched capacitor charge transfer circuit operating on an internally generated 1 MHz four-phase nonoverlapping clock. The design takes into account the electrostatic forces, the damping force, and the applied force due to acceleration

Keywords

CMOS integrated circuits; SPICE; accelerometers; circuit CAD; micromachining; micromechanical devices; optimisation; 2D micromachined accelerometer; CMOS; applied force; charge transfer circuit; damping force; electrostatic forces; four-phase nonoverlapping clock; masking steps; microelectromechanical devices; on-chip switched capacitor; signal detection circuitry; standard CMOS process; surface 2D accelerometer; Accelerometers; CMOS process; Charge transfer; Clocks; Linearity; Signal detection; Signal generators; Switched capacitor circuits; Switching circuits; Two dimensional displays;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.552151

Filename

552151