Measured capacitance coefficients of multiconductor microstrip lines with small dimensions

Measured capacitance coefficients of parallel microstrip lines with widths between 10-20 μm, spaces between 5-60 μm, and dielectric thickness between 10-15 μm on silicon substrates are reported. The experimental data are compared with results computed from a two-dimensional finite-element simulation program called WIRECAP. The comparison shows good agreement, with an accuracy of ±5% for the total capacitance and ≠20% for the coupling capacitance. WIRECAP is also shown to be in good agreement with other available simulation programs, such as the University of Arizona capacitance calculator (UAC) program. The measured near-end crosstalks are reported and it is shown that they can be accurately predicted by using the measured coupling capacitance