• DocumentCode
    1255541
  • Title

    Improvements in fibre alignment tolerance using chemically etched monolithically integrated microlenses on InGaAs:InP pin photodetectors

  • Author

    Madhav, M. ; Ghosh, M. ; Mayer, Theresa S.

  • Author_Institution
    Dept. of Eng. Sci. & Mech., Pennsylvania State Univ., University Park, PA
  • Volume
    33
  • Issue
    10
  • fYear
    1997
  • fDate
    5/8/1997 12:00:00 AM
  • Firstpage
    891
  • Lastpage
    892
  • Abstract
    The monolithic integration of a microlens with an InGaAs:InP pin photodetector using a simple two-step wet chemical etching process is reported. Using this technology, improvements in fibre alignment tolerances from 28 to 56 μm were achieved for photodetectors with a 25 μm diameter active area
  • Keywords
    etching; lenses; optical fabrication; optical fibre communication; optical fibre couplers; optical receivers; p-i-n photodiodes; photodetectors; 25 micron; 28 to 56 micron; InGaAs:InP; active area; fibre alignment tolerance; monolithically integrated microlenses; optical receivers; pin photodetectors; two-step wet chemical etching;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19970572
  • Filename
    592636
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1255541