Title :
Improvements in fibre alignment tolerance using chemically etched monolithically integrated microlenses on InGaAs:InP pin photodetectors
Author :
Madhav, M. ; Ghosh, M. ; Mayer, Theresa S.
Author_Institution :
Dept. of Eng. Sci. & Mech., Pennsylvania State Univ., University Park, PA
fDate :
5/8/1997 12:00:00 AM
Abstract :
The monolithic integration of a microlens with an InGaAs:InP pin photodetector using a simple two-step wet chemical etching process is reported. Using this technology, improvements in fibre alignment tolerances from 28 to 56 μm were achieved for photodetectors with a 25 μm diameter active area
Keywords :
etching; lenses; optical fabrication; optical fibre communication; optical fibre couplers; optical receivers; p-i-n photodiodes; photodetectors; 25 micron; 28 to 56 micron; InGaAs:InP; active area; fibre alignment tolerance; monolithically integrated microlenses; optical receivers; pin photodetectors; two-step wet chemical etching;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19970572
