Title :
1 × 2 MOEMS switch based on silicon-on-insulator and polymeric waveguides
Author :
Bakke, T. ; Tigges, C.P. ; Sullivan, C.T.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
fDate :
2/14/2002 12:00:00 AM
Abstract :
A new planar optical switch concept based on a silicon-on-insulator microelectromechanical system (MEMS) structure with post-processed polymeric waveguides is reported. The actuation voltage is 20 to 50 V, and the switching time as low as 30 μs. A crosstalk of -32 dB has been measured
Keywords :
micro-optics; microactuators; optical crosstalk; optical planar waveguides; optical polymers; optical switches; silicon-on-insulator; 1 by 2 MOEMS switch; 20 to 50 V; 30 mus; MEMS structure; SOI; Si; actuation voltage; crosstalk; microelectromechanical system; planar optical switch concept; planar waveguide; post-processed polymeric waveguides; silicon-on-insulator; switching time;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20020110
