• DocumentCode
    1255591
  • Title

    Advanced manufacturing equipment: a vertical batch furnace for 300-mm wafer processing

  • Author

    Hasper, Albert ; Oosterlaken, Ed ; Huussen, Frank ; Claasen-Vujcic, Tanja

  • Author_Institution
    ASM Eur., Bilthoven, Netherlands
  • Volume
    19
  • Issue
    5
  • fYear
    1999
  • Firstpage
    34
  • Lastpage
    43
  • Abstract
    Production of 300-mm diameter wafers will begin in the next few years. To keep costs low and throughput high, manufacturers must design new equipment such as the furnace system presented here, rather than simply upscaling existing 200-mm equipment
  • Keywords
    furnaces; integrated circuit manufacture; wafer-scale integration; 300-mm diameter wafers; 300-mm wafer processing; vertical batch furnace; Boats; Costs; Europe; Furnaces; Hardware; Inductors; Manufacturing processes; Production equipment; Robots; Throughput;
  • fLanguage
    English
  • Journal_Title
    Micro, IEEE
  • Publisher
    ieee
  • ISSN
    0272-1732
  • Type

    jour

  • DOI
    10.1109/40.798107
  • Filename
    798107
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1255591