• DocumentCode
    1256131
  • Title

    Special Section on the 2010 International Conference on Microelectronic Test Structures

  • Author

    Ohguro, Tatsuya

  • Author_Institution
    Toshiba Corporation, Yokohama, Japan
  • Volume
    25
  • Issue
    3
  • fYear
    2012
  • Firstpage
    293
  • Lastpage
    293
  • Abstract
    This special section contains a representative selection of papers presented at the 2010 International Conference on Microelectronic Test Structures (ICMTS).
  • Keywords
    Meetings; Microelectronics; Semiconductor device testing; Special issues and sections;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2012.2203840
  • Filename
    6255865
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1256131