A hierarchical circuit-level design methodology for microelectromechanical systems

Author

Fedder, Gary K. ; Jing, Qi

Author_Institution

Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA

Volume

46

Issue

10

fYear

1999

fDate

10/1/1999 12:00:00 AM

Firstpage

1309

Lastpage

1315

Abstract

A circuit-level methodology for hierarchical design and nodal simulation of microelectromechanical systems (MEMS) is presented. A layout-based schematic view is introduced as a geometrically intuitive MEMS representation that is transformed into a schematic suitable for behavioral simulation. As examples of the design methodology, suspended-MEMS inertial sensors, resonant actuators, and filters are designed using a small set of geometrically parameterized plate, beam, gap, and anchor elements. Effects of manufacturing variations are evaluated by simply changing parameter values of the elements

Keywords

accelerometers; band-pass filters; electronic design automation; microactuators; micromechanical devices; microsensors; passive filters; resonator filters; MEMS design; behavioral simulation; hierarchical circuit-level design methodology; hierarchical design; layout-based schematic view; manufacturing variations; microelectromechanical systems; micromechanical filters; nodal simulation; resonant actuators; suspended-MEMS inertial sensors; Actuators; Circuit simulation; Design automation; Design methodology; Electromechanical sensors; Manufacturing; Microelectromechanical systems; Micromechanical devices; Solid modeling; Wireless sensor networks;

fLanguage

English

Journal_Title

Circuits and Systems II: Analog and Digital Signal Processing, IEEE Transactions on

Publisher

ieee

ISSN

1057-7130

Type

jour

DOI

10.1109/82.799682

Filename

799682