Title :
Physically-Aware Analysis of Systematic Defects in Integrated Circuits
Author :
Wing Chiu Tam ; Blanton, R.D.
Abstract :
Design-induced systematic defects are serious threats to the semiconductor industry. This paper develops novel techniques to identify and prevent such defects, which facilitate to evaluate the effectiveness of DFM rules and improve the manufacturing process and design for yield enhancement.
Keywords :
design for manufacture; integrated circuit design; integrated circuit yield; semiconductor industry; DFM rules; design-for-manufacturability; design-induced systematic defects; integrated circuits; manufacturing process; physically-aware analysis; semiconductor industry; serious threats; yield enhancement; Fault diagnosis; Feature extraction; Integrated circuit modeling; Systematics; Testing; DFM rule evaluation; Systematic defects; layout analysis; volume diagnosis; yield learning;
Journal_Title :
Design & Test of Computers, IEEE
DOI :
10.1109/MDT.2012.2211093
