Title :
Guest editorial special issue on the modeling of collisional or near-collisionless low-temperature plasmas
Author :
Meyyappan, M. ; Economou, Demetre J. ; Makabe, T.
Keywords :
Chemical engineering; Plasma applications; Plasma chemistry; Plasma diagnostics; Plasma materials processing; Plasma sheaths; Plasma simulation; Plasma sources; Plasma transport processes; Semiconductor process modeling;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.1999.799797
