DocumentCode :
1257813
Title :
Extension of the nonlocal approach to evaluate the electron velocity distribution
Author :
Schmidt, Martin ; Uhrlandt, Dirk ; Winkler, Rolf
Author_Institution :
Inst. of Nonisothermal Plasmaphys., Greifswald, Germany
Volume :
27
Issue :
5
fYear :
1999
fDate :
10/1/1999 12:00:00 AM
Firstpage :
1271
Lastpage :
1278
Abstract :
The method of the nonlocal approach is used to describe the spatially dependent electron kinetics in an inert gas dc column plasma taking into account the space charge confinement. The historical concept of the method, the applied simplification of the electron kinetic equation, and the specifications about its validity are critically discussed. The accuracy of the results are evaluated by means of detailed comparisons with a strict solution of the relevant kinetic equation based on the two-term approximation. An extension of the method is deduced to estimate the anisotropic part of the electron velocity distribution which allows an approximate description of the electron particle and power fluxes. These estimations are used for a consistent treatment of the spatially resolved electron power balance in the column plasma
Keywords :
inert gases; plasma kinetic theory; plasma transport processes; approximate description; column plasma; electron kinetic equation; electron particle; electron velocity distribution; inert gas dc column plasma; nonlocal approach; power flux; space charge confinement; spatially dependent electron kinetics; spatially resolved electron power balance; two-term approximation; Anisotropic magnetoresistance; Differential equations; Electrons; Integral equations; Kinetic theory; Plasma confinement; Plasma materials processing; Plasma sources; Space charge; Spatial resolution;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/27.799803
Filename :
799803
Link To Document :
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