Author_Institution :
AT&T Bell Lab., Allentown, PA, USA
Abstract :
The X-Y (in-plane) expansivity was measured over the -40-140°C range for several of the ceramics used in modern hybrids, single-chip packages, and multichip modules. These thermal expansion data were compared to those of silicon and the materials used for leads, lids, heat spreaders, and sinks. The expansivity of aluminas of different purities (92-99.5%), low-temperature cofired ceramics, aluminum nitride, and beryllia was measured. A k=4.8 sample was expansivity-matched to Si, and a k=8.0 sample matched to alumina. No significant effect of metallization of the multilayers on the expansivity was found. Aluminum nitride was found to be well matched to silicon, whereas beryllia was found to be well matched to alumina, Kovar, Invar, Alloy 42, molybdenum, and two composites, namely copper-molybdenum-copper and copper-Invar-copper, were measured. Kovar is well matched to alumina ceramic at room temperature; below and above room temperature, however, the expansivity of Kovar diverges from that of alumina
Keywords :
ceramics; metals; packaging; thermal expansion; -40 to 140 C; Al2O3; AlN; Alloy 42; BeO; Cu-FeMnNi-Cu; Cu-Invar-Cu; CuMoCu; Invar; Kovar; Mo; X-Y expansivity; ceramics; electronic packages; heat spreaders; metallization; multichip modules; single-chip packages; temperature dependence; thermal expansion; Aluminum nitride; Ceramics; Heat sinks; Metallization; Multichip modules; Nonhomogeneous media; Packaging; Silicon; Temperature dependence; Thermal expansion;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on