Gamma-electron dynamics and radio frequency capacitive sheath diagnostics

Author

Orlov, Konstantin E. ; Smirnov, Alexander S.

Author_Institution

Dept. of Plasma Phys., St. Petersburg State Tech. Univ., Russia

Volume

27

Issue

5

fYear

1999

fDate

10/1/1999 12:00:00 AM

Firstpage

1348

Lastpage

1352

Abstract

Time-resolved measurements of gamma-electrons energy spectra in low-pressure capacitively coupled RF discharge are presented. Time dependence of the sheath voltage is calculated from experimental results and compared with theoretical predictions. Good quantitative agreement is observed for collisional sheath. In low pressure discharge sheath voltage time dependence is close to [1+cos(ωτ)], which qualitatively corresponds to the theoretical results. Asymmetry of electron energy spectra for increasing and decreasing sheath voltage is observed and explained by divergence and convergence of electron trajectories in plasma (klystron-effect)

Keywords

convergence of numerical methods; high-frequency discharges; plasma diagnostics; plasma sheaths; secondary electron emission; 13.56 MHz; capacitative discharge; collisional sheath; convergence; divergence; electron energy spectra; energy spectra; gamma-electron dynamics; klystron effect; low pressure discharge; low-pressure capacitively coupled RF discharge; plasma electron trajectories; radio frequency capacitive sheath diagnostics; secondary electron emission; sheath voltage; time dependence; time-resolved measurements; voltage waveform measurement; Circuits; Electrodes; Electrons; Energy measurement; Plasma measurements; Plasma properties; Plasma sheaths; Radio frequency; Time measurement; Voltage;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.799811

Filename

799811