Title :
Gamma-electron dynamics and radio frequency capacitive sheath diagnostics
Author :
Orlov, Konstantin E. ; Smirnov, Alexander S.
Author_Institution :
Dept. of Plasma Phys., St. Petersburg State Tech. Univ., Russia
fDate :
10/1/1999 12:00:00 AM
Abstract :
Time-resolved measurements of gamma-electrons energy spectra in low-pressure capacitively coupled RF discharge are presented. Time dependence of the sheath voltage is calculated from experimental results and compared with theoretical predictions. Good quantitative agreement is observed for collisional sheath. In low pressure discharge sheath voltage time dependence is close to [1+cos(ωτ)], which qualitatively corresponds to the theoretical results. Asymmetry of electron energy spectra for increasing and decreasing sheath voltage is observed and explained by divergence and convergence of electron trajectories in plasma (klystron-effect)
Keywords :
convergence of numerical methods; high-frequency discharges; plasma diagnostics; plasma sheaths; secondary electron emission; 13.56 MHz; capacitative discharge; collisional sheath; convergence; divergence; electron energy spectra; energy spectra; gamma-electron dynamics; klystron effect; low pressure discharge; low-pressure capacitively coupled RF discharge; plasma electron trajectories; radio frequency capacitive sheath diagnostics; secondary electron emission; sheath voltage; time dependence; time-resolved measurements; voltage waveform measurement; Circuits; Electrodes; Electrons; Energy measurement; Plasma measurements; Plasma properties; Plasma sheaths; Radio frequency; Time measurement; Voltage;
Journal_Title :
Plasma Science, IEEE Transactions on
