DocumentCode
1259586
Title
New micromachined inductors on silicon substrates
Author
Park, Jae Y. ; Allen, Mark G.
Author_Institution
Microsyst. Lab., LG Corp. Inst. of Technol., Seoul, South Korea
Volume
35
Issue
5
fYear
1999
fDate
9/1/1999 12:00:00 AM
Firstpage
3547
Lastpage
3549
Abstract
Microinductors with two layer vertically stacked spiral-type copper conductor lines and permalloy core have been fabricated, characterized, and compared using micromachining techniques. In this research, micromachined inductors with vertically laminated magnetic alloy cores are found to have better high frequency characteristics such as high inductance, high quality factor, and low AC resistance resulting in low magnetic core losses at high frequencies, than non-laminated types
Keywords
Permalloy; Q-factor; coils; copper; inductors; laminations; losses; magnetic cores; micromachining; silicon; Cu conductor lines; Cu-Si; Si; Si substrates; high frequency characteristics; high inductance; high quality factor; low AC resistance; low magnetic core losses; microinductors; micromachined inductors; permalloy core; spiral-type; two layer vertically stacked lines; vertically laminated magnetic alloy cores; Conductors; Copper; Frequency; Inductance; Inductors; Magnetic cores; Magnetic losses; Micromachining; Q factor; Silicon;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.800585
Filename
800585
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