Characteristics of twin spiral type thin film inductor with Fe-based nanocrystalline core

Author

Ryu, H.J. ; Han, S.H. ; Kim, H.J.

Author_Institution

Thin Film Technol. Res. Center, Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea

Volume

35

Issue

5

fYear

1999

fDate

9/1/1999 12:00:00 AM

Firstpage

3568

Lastpage

3570

Abstract

A new type of thin film inductor with Fe-based nanocrystalline core is proposed and we investigated the characteristics of the inductor with varying frequency. We used a dry and wet process for fabricating the inductor. In order to improve mutual inductance in the center of the inductor, current direction is set opposite in each coil. The inductance of the simulated and the fabricated inductor are 1170 nH and 800 nH at 1 MHz, respectively. The difference of the value is considered to be caused by strip line broadening and local demagnetization field

Keywords

demagnetisation; ferromagnetic materials; inductors; iron alloys; magnetic cores; magnetic thin film devices; zirconium alloys; 1 MHz; FeZrCN; current direction; local demagnetization field; mutual inductance; nanocrystalline core; strip line broadening; twin spiral type thin film inductor; Coils; Conducting materials; Inductance; Integrated circuit technology; Magnetic cores; Magnetic devices; Mesh generation; Spirals; Strips; Thin film inductors;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.800592

Filename

800592