Integrated thin film magneto-impedance sensor head using plating process

Author

Takayama, A. ; Umehara, T. ; Yuguchi, A. ; Kato, H. ; Mohri, K. ; Uchiyama, T.

Author_Institution

Res. & Dev. Center, Minebea Co. Ltd, Shizuoka, Japan

Volume

35

Issue

5

fYear

1999

fDate

9/1/1999 12:00:00 AM

Firstpage

3643

Lastpage

3645

Abstract

An integrated thin film MI (magneto-impedance) sensor head constructed with a combination of a thin film NiFe MI element and thin film bias and negative feedback coils using a micro-plating technology, has been developed in order to solve the problems of an amorphous wire MI head. The sensor head showed a very high field-detection sensitivity of about 0.41%/A/m (33%/Oe) magnetized with pulse current and a small hysteresis for the change of an external field. We have fabricated a differential type sensor module using a pair of the thin film MI sensor heads. The output voltage of the sensor has a good linearity within the range of ±80 A/m, and the voltage was 25mV/A/m(2.0V/Oe), and has small thermal drift within 0.1 A/m°C. The consumption power of the sensor module was 165 mW

Keywords

coating techniques; coils; feedback; magnetic heads; magnetic sensors; magnetic thin film devices; 165 mW; NiFe; differential type sensor module; field-detection sensitivity; flame plating; integrated thin film sensor; magneto-impedance sensor head; micro-plating technology; negative feedback coils; plating process; thin film NiFe element; thin film bias coils; Amorphous magnetic materials; Amorphous materials; Coils; Hysteresis; Magnetic heads; Magnetic sensors; Negative feedback; Thin film sensors; Voltage; Wire;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.800617

Filename

800617