Title :
3-D microfabricated toroidal planar inductors with different magnetic core schemes for MEMS and power electronic applications
Author :
Liakopoulos, Trifon M. ; Ahn, Chong A.
Author_Institution :
Dept. of Electr. & Comput. Eng. & Comput. Sci., Cincinnati Univ., OH, USA
fDate :
9/1/1999 12:00:00 AM
Abstract :
Micromachined toroidal planar inductors that have three different magnetic core structures have been designed, fabricated, and characterized for MEMS and power electronic applications. A plain ring core shows a high inductance value of 10 μH in a low frequency range below 2 kHz, whereas both a ring core with an air gap and a spiral type core show higher inductance values in a high frequency range of 2 kHz-1 MHz. The inductors have a low resistance value of ~1.5 Ω with total dimensions 4 mm×1.5 mm×120 μm
Keywords :
DC-DC power convertors; LIGA; electromagnetic actuators; inductors; magnetic cores; microactuators; micromachining; micromechanical devices; power electronics; ultraviolet lithography; 1.5 mm; 1.5 ohm; 100 Hz to 1 MHz; 120 micron; 3-D microfabricated; 4 mm; MEMS; UV LIGA lithography; air gap; high frequency range; high inductance value; low frequency range; magnetic core structures; magnetic microactuators; micromachined toroidal planar inductors; on-chip DC/DC power convertor; plain ring core; power electronics; spiral type core; Application software; Coils; Fabrication; Frequency; Inductance; Inductors; Magnetic cores; Micromechanical devices; Power electronics; Spirals;
Journal_Title :
Magnetics, IEEE Transactions on
