Title :
Integration of high-frequency carrier-type thin-film magnetic field sensor with SmCo thin-film bias magnet
Author :
Takezawa, M. ; Kim, Y.H. ; Ishiyama, K. ; Baba, M. ; Ajiro, N. ; Yamaguchi, M. ; Arai, K.I. ; Wako, N. ; Abe, I.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
fDate :
9/1/1999 12:00:00 AM
Abstract :
A bridge-connected high-frequency carrier-type thin-film magnetic field sensor is fabricated on a SmCo magnetic thin-film which provides an in-plane dc bias magnetic field to the sensor. The dc bias field of 320 A/m is achieved by using a 3 μm thick SmCo underlayer. The sensitivity obtained is 8.4 mV/Oe which is 12 times as large as that without the SmCo thin-film magnet
Keywords :
cobalt alloys; magnetic sensors; magnetic thin film devices; magnetoresistive devices; niobium alloys; permanent magnets; samarium alloys; sensitivity; zirconium alloys; 3 mum; CoNbZr high-frequency carrier-type thin-film magnetic field sensor; Cu-CoNbZr-SiO2-SmCo; GMI sensor; SmCo thin-film bias magnet; SmCo underlayer; bridge-connected sensor; in-plane dc bias magnetic field; integration; sensitivity; Amorphous magnetic materials; Anisotropic magnetoresistance; Frequency; Leg; Magnetic anisotropy; Magnetic films; Magnetic sensors; Perpendicular magnetic anisotropy; Soft magnetic materials; Thin film sensors;
Journal_Title :
Magnetics, IEEE Transactions on
