• DocumentCode
    1260347
  • Title

    Experimental Study of \\langle \\hbox {110}\\rangle Uniaxial Stress Effects on p-Channel GaAs Quantum-Well FETs

  • Author

    Xia, Ling ; Tokranov, Vadim ; Oktyabrsky, Serge R. ; del Alamo, Jesús A.

  • Author_Institution
    Microsyst. Technol. Labs., Massachusetts Inst. of Technol., Cambridge, MA, USA
  • Volume
    58
  • Issue
    8
  • fYear
    2011
  • Firstpage
    2597
  • Lastpage
    2603
  • Abstract
    The impact of 〈110〉 uniaxial stress on 2-D hole gas (2DHG) transport and charge control in a GaAs quantum well (QW) is studied through wafer bending experiments. Ungated Hall bars and QW field-effect transistors (FETs) were characterized under various stress levels. Through Hall measurements, changes in hole mobility and concentration due to applied stress were separated. The piezoresistance coefficients of the 2DHG along the two 〈110 〉 directions in the GaAs QW have been determined for the first time. We found that the linear-regime current of the QW-FET changes due to a combination of piezoelectric effect and hole mobility changes. The value of these coefficients suggests that uniaxial strain engineering is a viable technique to improve p-channel GaAs QW-FET performance for future logic applications.
  • Keywords
    Hall effect devices; III-V semiconductors; field effect transistors; gallium arsenide; hole density; hole mobility; piezoresistance; quantum well devices; semiconductor device measurement; semiconductor quantum wells; 2D hole gas transport; 2DHG transport; GaAs; Hall measurement; charge control; field effect transistor; hole concentration; hole mobility; linear-regime current; p-channel gallium arsenide quantum well FET; piezoresistance coefficient; ungated Hall bar; uniaxial stress effect; wafer bending experiment; Bars; Current measurement; FETs; Gallium arsenide; Silicon; Strain; Stress; 2-D hole gas (2DHG); GaAs; Hall measurement; piezoresistance coefficient; quantum-well field-effect transistor (QW-FET); uniaxial stress;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2011.2157696
  • Filename
    5934406