DocumentCode
1261314
Title
Defect dependent memory switching in amorphous silicon alloys [a-Si xC1-x:H]
Author
Shannon, J.M. ; Gateru, R.G. ; Gerstner, E.G.
Author_Institution
Sch. of Electronics, Comput. & Math., Surrey Univ., Guildford, UK
Volume
38
Issue
5
fYear
2002
fDate
2/28/2002 12:00:00 AM
Firstpage
249
Lastpage
250
Abstract
It is shown that memory switching in amorphous silicon alloys is affected by ion bombardment. In particular, ion damage lowers the voltage required to form devices and switch them into the on-state. This technique enables optimised non-volatile memory devices to be made with improved switching ratios
Keywords
amorphous semiconductors; electrical conductivity transitions; hydrogen; ion beam effects; metal-semiconductor-metal structures; semiconductor storage; silicon compounds; wide band gap semiconductors; MSM structure; SixC1-x:H; a-SixC1-x:H; defect dependent memory switching; forming voltage; ion bombardment; ion damage; off-state current; optimised nonvolatile memory devices;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20020160
Filename
990225
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