Highly defined narrow track write heads fabricated by focused ion beam trimming with the Al2O3 refilling process

We have developed a focused ion beam trimmed write head using Al ₂O₃ refilling, in which an Al₂O₃ film was deposited and a two-step lapping process was performed after FIB trimming at the air bearing surface. This process provided highly defined pole edges without any rounded corners, well-filled hollows, and a damage-free read element. Good environment-proof characteristics were also obtained, because a diamond-like carbon film was deposited as a protective layer on the element after FIB trimming. The fabricated head showed good overwrite characteristics in half-micron width writing