Title :
Cr underlayer lattice modulation through alloying and multi-layer construction
Author :
Wong, Bunsen Y. ; Ying, Ji Feng
Author_Institution :
MMC Technol., San Jose, CA, USA
fDate :
9/1/1999 12:00:00 AM
Abstract :
The lattice parameter (a) of bcc CrX films can be predicted using the weighted average of the Cr and X atomic radius. However, a of the sputtered CrX film depends strongly on substrate biasing. a of the underlayer can also be modified using a CrX/Cr dual layer construction with different CrX alloys. By adjusting the thickness fraction of the CrX layer within the CrX/Cr underlayer structure, various a within the upper and lower fraction limits can be realized. Hence, a can be fine tuned to lattice match the Co-alloy and enhances the Mrt of the magnetic film
Keywords :
chromium alloys; lattice constants; magnetic multilayers; magnetic thin films; sputtered coatings; Cr alloy sputtered magnetic thin film; Cr underlayer; alloying; dual layer; lattice parameter modulation; multilayer; substrate bias; Alloying; Atomic measurements; Chromium alloys; Cobalt alloys; Lattices; Magnetic films; Magnetic properties; Modular construction; Optical films; Substrates;
Journal_Title :
Magnetics, IEEE Transactions on
