Finite element analysis of underwater capacitor micromachined ultrasonic transducers

A simple electromechanical equivalent circuit model is used to predict the behavior of capacitive micromachined ultrasonic transducers (cMUT). The equivalent circuit model of the cMUT lacks important features such as coupling to the substrate and the ability to predict crosstalk between elements of an array of transducers. To overcome these deficiencies, a finite element model of the cMUT is constructed using the commercial code ANSYS(R). Calculation results of the complex load impedance seen by single capacitor cells are presented, then followed by a calculation of the plane wave real load impedance seen by a parallel combination of many cells that are used to make a transducer. Crosstalk between 1-D array elements is found to be due to two main sources: coupling through a Stoneley wave propagating at the transducer-water interface and coupling through Lamb waves propagating in the substrate. To reduce the crosstalk level, the effect of structural variations of the substrate are investigated, which includes a change of its thickness and etched trenches or polymer walls between array elements.