DocumentCode :
1263027
Title :
Ferroelectric Thin-Film Capacitors and Piezoelectric Switches for Mobile Communication Applications
Author :
Klee, Mareike ; Van Esch, H. ; Keur, Wilco ; Kumar, Biju ; Van Leuken-Peters, L. ; Liu, Jin ; Mauczok, Rüdiger ; Neumann, Kai ; Reimann, Klaus ; Renders, Christel ; Roest, Aarnoud L. ; Tiggelman, Mark P J ; De Wild, M. ; Wunnicke, Olaf ; Zhao, Jing
Author_Institution :
Philips Res., Eindhoven, Netherlands
Volume :
56
Issue :
8
fYear :
2009
fDate :
8/1/2009 12:00:00 AM
Firstpage :
1505
Lastpage :
1512
Abstract :
Thin-film ferroelectric capacitors have been integrated with resistors and active functions such as ESD protection into small, miniaturized modules, which enable a board space saving of up to 80%. With the optimum materials and processes, integrated capacitors with capacitance densities of up to 100 nF/mm2 for stacked capacitors combined with breakdown voltages of 90 V have been achieved. The integration of these high-density capacitors with extremely high breakdown voltage is a major accomplishment in the world of passive components and has not yet been reported for any other passive integration technology. Furthermore, thin-film tunable capacitors based on barium strontium titanate with high tuning range and high quality factor at 1 GHz have been demonstrated. Finally, piezoelectric thin films for piezoelectric switches with high switching speed have been realized.
Keywords :
barium compounds; ferroelectric thin films; piezoelectric devices; strontium compounds; thin film capacitors; BaSrTiO3; capacitance densities; extremely high breakdown voltage; ferroelectric thin-film capacitors; piezoelectric switches; thin-film tunable capacitors; Capacitance; Capacitors; Communication switching; Electrostatic discharge; Ferroelectric materials; Mobile communication; Piezoelectric films; Protection; Resistors; Switches;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/TUFFC.2009.1213
Filename :
5183575
Link To Document :
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