Title :
Fabrication of high current and low profile micromachined inductor with laminated Ni/Fe core
Author :
Park, Jin-Woo ; Park, Jae Yeong ; Joung, Yeun-Ho ; Allen, Mark G.
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fDate :
3/1/2002 12:00:00 AM
Abstract :
A new process for the fabrication of high current and very low profile micromachined inductors has been developed. This process involves the combination of mechanical lamination and electrodeposition of copper windings by means of LIGA-like lithography through thick epoxy photoresists. The dimension of the fabricated inductor is 16 mm×19 mm×1 mm. The fabricated inductor has an inductance value of 1.2 μH with DC saturation current of 3 A and an electrical resistance of less than 30 mΩ at 10 kHz
Keywords :
electric resistance; electrodeposition; inductance; inductors; iron alloys; laminates; micromachining; nickel alloys; photoresists; ultraviolet lithography; windings; 1 mm; 10 kHz; 16 mm; 19 mm; 3 A; 30 mohm; Cu; DC saturation current; LIGA-like lithography; Ni-Fe; copper windings; electrical resistance; electrodeposition; epoxy photoresists; high current micromachined inductors; inductance value; inductor dimensions; laminated Ni/Fe core; low profile micromachined inductors; mechanical lamination; micromachined inductor fabrication; DC-DC power converters; Eddy currents; Electric resistance; Fabrication; Inductance; Inductors; Iron; Lamination; Magnetic cores; Saturation magnetization;
Journal_Title :
Components and Packaging Technologies, IEEE Transactions on
DOI :
10.1109/6144.991182
