• DocumentCode
    1263653
  • Title

    Process and Reliability Sensors for Nanoscale CMOS

  • Author

    Keane, J.P. ; Kim, Chul Han ; Qunzeng Liu ; Sapatnekar, Sachin S.

  • Volume
    29
  • Issue
    5
  • fYear
    2012
  • Firstpage
    8
  • Lastpage
    17
  • Abstract
    This paper describes the use of sensing schemes that drive on-chip process and aging variation measurements in manufactured silicon.
  • Keywords
    CMOS integrated circuits; integrated circuit manufacture; integrated circuit reliability; nanotechnology; aging variation measurement; nanoscale CMOS; on-chip process; process sensor; reliability sensor; Aging; Frequency measurement; Odometers; Path planning; Sensor phenomena and characterization; Stress analysis; Temperature measurement; Bias Temperature Instability; Critical Paths; Reliability; Sensors; Silicon odometer; Variations;
  • fLanguage
    English
  • Journal_Title
    Design & Test of Computers, IEEE
  • Publisher
    ieee
  • ISSN
    0740-7475
  • Type

    jour

  • DOI
    10.1109/MDT.2012.2211561
  • Filename
    6266774
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1263653