Planar microoptomechanical waveguide switches

Author

Bakke, Thor ; Tigges, Chris P. ; Lean, Jennifer Johnson ; Sullivan, Charles T. ; Spahn, Olga Blum

Author_Institution

Dept. of Phys. Electron., Norwegian Univ. of Sci. & Technol., Trondheim, Norway

Volume

8

Issue

1

fYear

2002

Firstpage

64

Lastpage

72

Abstract

Planar micromechanical waveguide switches based on lateral deflection of a cantilever beam are presented. Two material systems have been used: a GaAs-AlGaAs structure with integrated waveguides and a silicon-on-insulator (SOI), with postprocessed polymeric waveguides. The switches are characterized by low actuation voltage (3-20 V), short switching times (32-200 μs), and low crosstalk (< -30 dB)

Keywords

III-V semiconductors; aluminium compounds; electrostatic actuators; gallium arsenide; micro-optics; microwave photonics; optical communication equipment; optical crosstalk; optical planar waveguides; optical switches; silicon-on-insulator; 3 to 20 V; 32 to 200 mus; GaAs-AlGaAs; MOEMS; Si; cantilever beam; complex photonic systems; high-resolution space-borne array antennas; integrated electrostatic comb-drive actuators; integrated waveguides; lateral deflection; low actuation voltage; low crosstalk; ohmic contacts; planar microoptomechanical waveguide switches; polarization insensitivity; postprocessed polymeric waveguides; short switching times; silicon-on-insulator; true-time delay; Optical bistability; Optical crosstalk; Optical materials; Optical planar waveguides; Optical polymers; Optical switches; Optical waveguides; Planar waveguides; Polarization; Power semiconductor switches;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/2944.991400

Filename

991400