Title :
Planar microoptomechanical waveguide switches
Author :
Bakke, Thor ; Tigges, Chris P. ; Lean, Jennifer Johnson ; Sullivan, Charles T. ; Spahn, Olga Blum
Author_Institution :
Dept. of Phys. Electron., Norwegian Univ. of Sci. & Technol., Trondheim, Norway
Abstract :
Planar micromechanical waveguide switches based on lateral deflection of a cantilever beam are presented. Two material systems have been used: a GaAs-AlGaAs structure with integrated waveguides and a silicon-on-insulator (SOI), with postprocessed polymeric waveguides. The switches are characterized by low actuation voltage (3-20 V), short switching times (32-200 μs), and low crosstalk (< -30 dB)
Keywords :
III-V semiconductors; aluminium compounds; electrostatic actuators; gallium arsenide; micro-optics; microwave photonics; optical communication equipment; optical crosstalk; optical planar waveguides; optical switches; silicon-on-insulator; 3 to 20 V; 32 to 200 mus; GaAs-AlGaAs; MOEMS; Si; cantilever beam; complex photonic systems; high-resolution space-borne array antennas; integrated electrostatic comb-drive actuators; integrated waveguides; lateral deflection; low actuation voltage; low crosstalk; ohmic contacts; planar microoptomechanical waveguide switches; polarization insensitivity; postprocessed polymeric waveguides; short switching times; silicon-on-insulator; true-time delay; Optical bistability; Optical crosstalk; Optical materials; Optical planar waveguides; Optical polymers; Optical switches; Optical waveguides; Planar waveguides; Polarization; Power semiconductor switches;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.991400
