Title :
Standing-wave Fourier transform spectrometer based on integrated MEMS mirror and thin-film photodetector
Author :
Kung, Helen L. ; Bhalotra, Sameer R. ; Mansell, Justin D. ; Miller, David A B ; Harris, James S., Jr.
Author_Institution :
Dept. of Electr. Eng. & Appl. Phys., Stanford Univ., CA, USA
Abstract :
We report a novel, miniature Fourier transform spectrometer with a linear architecture that works by sampling a standing wave. The spectrometer consists of an electrostatically actuated microelectromechanical mirror with on-resonance displacement of up to 65 μm, a thin-film photodetector, and an electrical back plane for actuating the mirror. The integrated device offers mirror stability and fixed relative alignment of the three components. The spectrometer has better than 32-nm resolution at 633 nm
Keywords :
Fourier transform spectrometers; electrostatic devices; micro-optics; micromechanical devices; mirrors; photodetectors; stability; 633 nm; 65 micron; electrical back plane; electrostatically actuated microelectromechanical mirror; fixed relative alignment; integrated MEMS mirror; integrated device; linear architecture; miniature Fourier transform spectrometer; mirror stability; on-resonance displacement; resolution; spectrometer; standing wave; standing-wave transform spectrometer; thin-film photodetector; Biomedical signal processing; Fourier transforms; Interferometers; Micromechanical devices; Mirrors; Photodetectors; Sampling methods; Spectroscopy; Transistors; Wavelength measurement;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.991404
