Title :
Electron Heating in Dual-Radio-Frequency-Driven Atmospheric-Pressure Plasmas
Author :
O´Neill, C. ; Waskoenig, J. ; Gans, T.
Author_Institution :
Centre for Plasma Phys., Queens Univ. Belfast, Belfast, UK
Abstract :
Dual-frequency operation of radio-frequency-driven atmospheric-pressure plasmas offers enhanced control over power coupling and ionization mechanisms. Nonlinear frequency coupling in the plasma boundary sheath governs the dynamics of plasma ionization and associated mode transitions. Variations of the voltage ratios allow us to manipulate the temporal and spatial structures of plasma ionization.
Keywords :
ionisation; plasma diagnostics; plasma heating; plasma nonlinear processes; plasma sheaths; dual-radio-frequency-driven atmospheric-pressure plasma; electron heating; mode transitions; nonlinear frequency coupling; plasma boundary sheath; plasma ionization; power coupling; pressure 1 atm; spatial structure; temporal structure; voltage ratio; Atmospheric-pressure plasmas; Couplings; Frequency control; Gallium nitride; Helium; Ionization; Atmospheric pressure plasmas; plasma sheaths; plasma simulation;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2153882
